Error 500 when trying to install 3.0.1

Hey,

installing Piwik 3.0.0 works fine (no errors in system check), but when I try to install version 3.0.1 I get an Error 500 at system check page. Php-Error Log is empty and Apache Log only displays “premature end of script headers”.

I am using PHP 7.0.x with FPM and apache 2.

Any ideas?